When preparing cross sections, the standard procedure using the FIB-SEM technique is the use of high currents to quickly remove material, then lower the FIB current for an improved beam profile and ...
An example of a correlative study between XRM and FIB-SEM has been presented in an earlier study. 1 This article will expand the correlation one step beneath the length scale to link FIB-SEM and TEM, ...
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